The relationship between the Young's modulus and dry etching rate of polydimethylsiloxane (PDMS).

Fitzgerald ML, Tsai S, Bellan LM, Sappington R, Xu Y, Li D
Biomed Microdevices. 2019 21 (1): 26

PMID: 30826983 · PMCID: PMC6563612 · DOI:10.1007/s10544-019-0379-8

MeSH Terms (3)

Dimethylpolysiloxanes Elastic Modulus Lab-On-A-Chip Devices

Connections (1)

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