Ann Price
Last active: 2/2/2015

Cryogenic Etching of Silicon: An Alternative Method For Fabrication of Vertical Microcantilever Master Molds.

Addae-Mensah KA, Retterer S, Opalenik SR, Thomas D, Lavrik NV, Wikswo JP
J Microelectromech Syst. 2009 19 (1)

PMID: 24223478 · PMCID: PMC3818692 · DOI:10.1109/JMEMS.2009.2037440

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